System accessories
CATHODES
COTEC® provides replacement and working parts for the MARK I and MARK II ion sources:
Filaments/Cathoden
Art.-No. | Description | eBeam-gun | System |
---|---|---|---|
23008VT | U6LQ | ESV6 | Leybold, spiral U-Shape straight |
23005VT | W14 | ESV14 | Leybold, 90˚ |
23009VT | U110 | ESQ110 | Balzers, spiral U-Shape cut |
23018VT | U295 | 295 | Telemark/Temescal, spiral U-Shape |