System accessories

CATHODES

COTEC^® provides replacement and working parts for the MARK I and MARK II ion sources:

Filaments/Cathoden

Art.-No.	Description	eBeam-gun	System
23008VT	U6LQ	ESV6	Leybold, spiral U-Shape straight
23005VT	W14	ESV14	Leybold, 90˚
23009VT	U110	ESQ110	Balzers, spiral U-Shape cut
23018VT	U295	295	Telemark/Temescal, spiral U-Shape