System accessories

CATHODES

COTEC® provides replacement and working parts for the MARK I and MARK II ion sources:

Filaments/Cathoden

Art.-No. Description eBeam-gun System
23008VT U6LQ ESV6 Leybold, spiral U-Shape straight
23005VT W14 ESV14 Leybold, 90˚
23009VT U110 ESQ110 Balzers, spiral U-Shape cut
23018VT U295 295 Telemark/Temescal, spiral U-Shape